Treffer: Towards robust ultra-low k spin-on dielectric materials
Title:
Towards robust ultra-low k spin-on dielectric materials
Authors:
Source:
2025 IEEE International Interconnect Technology Conference (IITC) Interconnect Technology Conference (IITC), 2025 IEEE International. :1-3 Jun, 2025
Relation:
2025 IEEE International Interconnect Technology Conference (IITC)
Database:
IEEE Xplore Digital Library