• Non-Cyclic Scheduling of Singl...

Treffer: Non-Cyclic Scheduling of Single-Armed Cluster Tools for Processing Two Wafer Types

Title:
Non-Cyclic Scheduling of Single-Armed Cluster Tools for Processing Two Wafer Types
Authors:
Yang, F., Xu, X., Yang, Z., Li, C., Zhen, L., Wu, N.
Source:
IEEE Transactions on Automation Science and Engineering IEEE Trans. Automat. Sci. Eng. Automation Science and Engineering, IEEE Transactions on. 22:14133-14146 2025
Database:
IEEE Xplore Digital Library