AMATO, Umberto, ANTONIADIS, Anestis, DE FEIS, Italia, DOINYCHKO, Anastasiia, GIJBELS, Irene, LA MAGNA, Antonino, PAGANO, Daniele, PICCININI, Francesco, SELVAN SUVISESHAMUTHU, Easter, SEVERGNINI, Carlo, TORRES, Andres und VASQUEZ, Patrizia, 2025. Detecting Important Features and Predicting Yield from Defects Detected by SEM in Semiconductor Production. ISSN:1424-8220 ; Sensors, vol. 25 (13), Art.No. ARTN 4218. 1 Januar 2025. DOI 10.3390/s25134218.

Amato, U., Antoniadis, A., De Feis, I., Doinychko, A., Gijbels, I., La Magna, A., Pagano, D., Piccinini, F., Selvan Suviseshamuthu, E., Severgnini, C., Torres, A., Vasquez, P., 2025. Detecting Important Features and Predicting Yield from Defects Detected by SEM in Semiconductor Production. ISSN:1424-8220 ; Sensors, vol. 25 (13), Art.No. ARTN 4218. https://doi.org/10.3390/s25134218

Amato, U., Antoniadis, A., De Feis, I., Doinychko, A., Gijbels, I., La Magna, A., Pagano, D., Piccinini, F., Selvan Suviseshamuthu, E., Severgnini, C., Torres, A., & Vasquez, P. (2025). Detecting Important Features and Predicting Yield from Defects Detected by SEM in Semiconductor Production. ISSN:1424-8220 ; Sensors, Vol. 25 (13), Art.No. ARTN 4218. https://doi.org/10.3390/s25134218

Amato U, Antoniadis A, De Feis I, Doinychko A, Gijbels I, La Magna A, Pagano D, Piccinini F, Selvan Suviseshamuthu E, Severgnini C, Torres A, Vasquez P (2025) Detecting Important Features and Predicting Yield from Defects Detected by SEM in Semiconductor Production. ISSN:1424-8220 ; Sensors, vol. 25 (13), Art.No. ARTN 4218. https://doi.org/10.3390/s25134218

Amato, Umberto/ Antoniadis, Anestis/ De Feis, Italia/ Doinychko, Anastasiia/ Gijbels, Irene/ La Magna, Antonino/ Pagano, Daniele/ Piccinini, Francesco/ Selvan Suviseshamuthu, Easter/ Severgnini, Carlo/ Torres, Andres/ Vasquez, Patrizia, Detecting Important Features and Predicting Yield from Defects Detected by SEM in Semiconductor Production, ISSN:1424-8220 ; Sensors, vol. 25 (13), Art.No. ARTN 4218 2025.