AMATO, Umberto, ANTONIADIS, Anestis, DE FEIS, Italia, FAZIO, Domenico, GENUA, Caterina, GIJBELS, Irene, GRANATA, Donatella, LA MAGNA, Antonino, PAGANO, Daniele, TOCHINO, Gabriele und VASQUEZ, Patrizia, 2023. Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry. ISSN:1424-8220 ; Sensors, vol. 23 (14), Art.No. ARTN 6249. 1 Januar 2023. DOI 10.3390/s23146249.
Elsevier - Harvard (with titles)Amato, U., Antoniadis, A., De Feis, I., Fazio, D., Genua, C., Gijbels, I., Granata, D., La Magna, A., Pagano, D., Tochino, G., Vasquez, P., 2023. Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry. ISSN:1424-8220 ; Sensors, vol. 23 (14), Art.No. ARTN 6249. https://doi.org/10.3390/s23146249
American Psychological Association 7th editionAmato, U., Antoniadis, A., De Feis, I., Fazio, D., Genua, C., Gijbels, I., Granata, D., La Magna, A., Pagano, D., Tochino, G., & Vasquez, P. (2023). Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry. ISSN:1424-8220 ; Sensors, Vol. 23 (14), Art.No. ARTN 6249. https://doi.org/10.3390/s23146249
Springer - Basic (author-date)Amato U, Antoniadis A, De Feis I, Fazio D, Genua C, Gijbels I, Granata D, La Magna A, Pagano D, Tochino G, Vasquez P (2023) Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry. ISSN:1424-8220 ; Sensors, vol. 23 (14), Art.No. ARTN 6249. https://doi.org/10.3390/s23146249
Juristische Zitierweise (Stüber) (Deutsch)Amato, Umberto/ Antoniadis, Anestis/ De Feis, Italia/ Fazio, Domenico/ Genua, Caterina/ Gijbels, Irene/ Granata, Donatella/ La Magna, Antonino/ Pagano, Daniele/ Tochino, Gabriele/ Vasquez, Patrizia, Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry, ISSN:1424-8220 ; Sensors, vol. 23 (14), Art.No. ARTN 6249 2023.