Treffer: Genetic Algorithm-Based Approach for Mask Design Generation in Wet Etching Silicon Corrosion.
Title:
Genetic Algorithm-Based Approach for Mask Design Generation in Wet Etching Silicon Corrosion.
Authors:
Rehder, Ana Paula1 anapaularehder@usp.br, Guerra Tsuzuki, Marcos Sales1 mtsuzuki@usp.br, de Castro Martins, Thiago1 thiago@usp.br
Source:
Computer-Aided Design & Applications. 2026, Vol. 23 Issue 2, p162-179. 18p.
Database:
Business Source Ultimate